Information about RF Generators

RF generators provide power for thin film processing equipment, semiconductor fabrication systems, plasma generation, induction heating, telecommunications applications, and radar equipment. RF generators are also used to power computers, computer peripherals, medical devices, magnetic devices, and test equipment. Single-phase AC inputs are used with lower voltage applications. Three-phase AC inputs are used with high voltage power supplies. Products that meet U.S. military specifications (MIL-SPEC) accept high frequency inputs, typically in the 400 Hz range. Common AC input voltages include 115, 208, 230, and 480 VAC. Common AC input frequencies are 50 and 60 Hz. Output specifications for RF generators include output frequency, voltage and current; adjustable frequency, voltage, and current; and output power, an amount expressed in watts (W). Automatic frequency tuning (AFT) reduces harmonics, improves speed and reliability, and eliminates the tuning elements found in many traditional networks.

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