Ion beam guns and electron beam guns produce beams of electrons, ions or other particles for use in chemical and surface analysis, particle physics, resin curing or semiconductor manufacturing.
Thin film materials are high purity materials and chemicals such as precursor gases, sputtering targets or evaporation filaments used to form or modify thin film deposits and substrates.
Thin film sources consist of magnetrons, evaporation thermal units, ion beams and other sources that produce deposition materials (vapors or ions) in a thin film system.